excitation resistance造句

• The silicon micro - machining technology is used to fabricate the bi - layered silicon microcantilever resonators , the excitation of silicon micro - resonators is achieved using electro - thermal method via fabricating thermal excitation resistance on the silicon microcantilever beam
  利用硅微机械加工工艺制作了双层结构硅微悬臂梁谐振器，通过在硅微悬臂梁上制作的热激励电阻，用电热方法对硅微谐振器实现了激振。